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Caractérisation électrique d'hétérostructures et de couches minces semiconductrices par effet Hall. I: Superréseaux GaAs/AlAs. II: Silicium sur isolant = Electrical characterization of semiconductivity heterostructures and thin films using Hall effect. I: GaAs/AlAs. II: Silicon on insulatorJeanjean, Philippe; Robert, J. L.1992, 170 p.Thesis

The sensitivity of thermal donor generation in silicon to self-interstitial sinksVORONKOV, V. V; VORONKOVA, G. I; BATUNINA, A. V et al.Journal of the Electrochemical Society. 2000, Vol 147, Num 10, pp 3899-3906, issn 0013-4651Article

Application of ultra-rapid thermal annealing for electrical activation for next generation MOSFETsSUGURO, Kyoichi; ITO, Takayuki; NISHINOHARA, Kazumi et al.Proceedings - Electrochemical Society. 2004, pp 39-49, issn 0161-6374, isbn 1-56677-406-3, 11 p.Conference Paper

Characterization of Ge nanocrystals in a-SiO2 synthesized by rapid thermal annealingCHOI, W. K; KANAKARAIU, S; SHEN, Z. X et al.Applied surface science. 1999, Vol 144-45, pp 697-701, issn 0169-4332Conference Paper

Spin-on glass curing by rapid thermal annealingUOOCHI, Y; TABUCHI, A; FURUMURA, Y et al.Journal of the Electrochemical Society. 1990, Vol 137, Num 12, pp 3923-3925, issn 0013-4651Article

Residual defects in high-energy B-, P- and As-implanted Si by rapid thermal annealingTAMURA, M; OHYU, K.Applied physics. A, Solids and surfaces. 1989, Vol 49, Num 2, pp 149-155, issn 0721-7250, 7 p.Article

Controlling surface shallow junction depth by a rapid thermal annealing process with low ambient pressureHUANG, Yi-Jen; LIU, Chun-Chu; LO, Kuang-Yao et al.Applied surface science. 2011, Vol 257, Num 7, pp 2494-2497, issn 0169-4332, 4 p.Article

Dose loss and diffusion in BF2 implanted silicon during rapid thermal annealingDOKUMACI, Omer; RONSHEIM, Paul; HEGDE, Suri et al.Proceedings - Electrochemical Society. 2003, pp 105-110, issn 0161-6374, isbn 1-56677-396-2, 6 p.Conference Paper

effect of oxidation induced stacking fault (OSF) ring on generation and motion of slip dislocationGONZALEZ, F; THAKUR, R. P. S; BONDARENKO, I et al.SPIE proceedings series. 1997, pp 223-234, isbn 0-8194-2765-9Conference Paper

Sample geometry effects in rapid thermal annealingRUGGLES, G. A; HONG, S. N; WORTMAN, J. J et al.Journal of vacuum science and technology. B. Microelectronics processing and phenomena. 1990, Vol 8, Num 2, pp 122-127, issn 0734-211X, 6 p.Article

Doping of diamond by coimplantation of carbon and boronSANDHU, G. S; SWANSON, M. L; CHU, W. K et al.Applied physics letters. 1989, Vol 55, Num 14, pp 1397-1399, issn 0003-6951, 3 p.Article

Effect of rapid thermal annealing process on calcination of tin oxide powderHYANG HO SON; WON GYU LEE.Surface and interface analysis. 2012, Vol 44, Num 8, pp 989-992, issn 0142-2421, 4 p.Conference Paper

A study of nonequilibrium diffusion modeling-applications to rapid thermal annealing and advanced bipolar technologiesBACCUS, B; WADA, T; SHIGYO, N et al.I.E.E.E. transactions on electron devices. 1992, Vol 39, Num 3, pp 648-661, issn 0018-9383Article

Rapid thermal annealing of indium-implanted silicon single crystalsSHIRYAEV, S. YU; NYLANDSTED LARSEN, A; SAFRONOV, N et al.Journal of applied physics. 1989, Vol 65, Num 11, pp 4220-4224, issn 0021-8979, 5 p.Article

Effect of different annealing methods on ferroelectric properties of 0.95Pb(Sc0.5Ta0.5)O3-0.05PbTiO3 thin filmsXUEDONGLI; HONGLIGUO; HONGLIU et al.Applied surface science. 2011, Vol 257, Num 15, pp 6756-6760, issn 0169-4332, 5 p.Article

Control of substrate surface temperature in millisecond annealing technique using thermal plasma jetOKADA, T; HIGASHI, S; KAKU, H et al.Thin solid films. 2007, Vol 515, Num 12, pp 4897-4900, issn 0040-6090, 4 p.Conference Paper

Electronic transport in ambipolar silicon nanowiresCOLLI, A; PISANA, S; FASOLI, A et al.Physica status solidi. B. Basic research. 2007, Vol 244, Num 11, pp 4161-4164, issn 0370-1972, 4 p.Conference Paper

Thermal decomposition mechanism of N2-impurity helium solidsPOPOV, E. A; AHOKAS, J; ELORANTA, J et al.Journal of low temperature physics. 2005, Vol 139, Num 5-6, pp 557-562, issn 0022-2291, 6 p.Conference Paper

X-Ray photoelectron spectroscopy study of phosphorus silicate glassesBESHKOV, G; KRASTEV, V; GRIGOROV, K et al.Surface & coatings technology. 2002, Vol 161, Num 1, pp 11-19, issn 0257-8972Article

Modeling of ultrahighly doped shallow junctions for aggressively scaled CMOSKENNEL, H. W; CEA, S. M; LILAK, A. D et al.IEDm : international electron devices meeting. 2002, pp 875-878, isbn 0-7803-7462-2, 4 p.Conference Paper

Vacuum rapid thermal annealing of quartz resonatorsLAZAROVA, V; YORDANOV, Ts; SPASSOV, L et al.Vacuum. 2002, Vol 69, Num 1-3, pp 379-383, issn 0042-207X, 5 p.Conference Paper

Rapid thermal annealed Cr barrier against Cu diffusionCHUANG, Jui-Chang; TU, Shuo-Lun; CHEN, Mao-Chieh et al.Journal of the Electrochemical Society. 1999, Vol 146, Num 7, pp 2643-2647, issn 0013-4651Article

Phosphorus pileup and sublimation at the silicon surfaceSATO, Y; IMAI, K; YABUMOTO, N et al.Journal of the Electrochemical Society. 1997, Vol 144, Num 7, pp 2548-2551, issn 0013-4651Article

Deep states associated with oxidation induced stacking faults in RTA p-type silicon before and after copper diffusionSARITAS, M; PEAKER, A. R.Solid-state electronics. 1995, Vol 38, Num 5, pp 1025-1034, issn 0038-1101Article

Electrical properties of rapid thermal annealing induced defects in siliconSUSI, E; POGGI, A; MADRIGALI, M et al.Journal of the Electrochemical Society. 1995, Vol 142, Num 6, pp 2081-2085, issn 0013-4651Article

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